Magnetoresistive Element and Magnetic Memory

ABSTRACT

There is provided a magnetoresistive element whose magnetization direction is stable in a direction perpendicular to the film surface and whose magnetoresistance ratio is controlled, as well as magnetic memory using such a magnetoresistive element. By having the material of a ferromagnetic layer forming the magnetoresistive element comprise a ferromagnetic material containing at least one type of  3 d transition metal, or a Heusler alloy, to control the magnetoresistance ratio, and by controlling the thickness of the ferromagnetic layer on an atomic layer level, the magnetization direction is changed from being in-plane with the film surface to being perpendicular to the film surface.

TECHNICAL FIELD

The present invention relates to a magnetoresistive element, and to magnetic memory comprising such a magnetoresistive element as a memory cell.

BACKGROUND ART

As shown in FIG. 1, a memory cell 100 of magnetic random access memory (MRAM) has a structure where a magnetoresistive element 101 and a select transistor 102 are electrically connected in series. The source electrode, drain electrode, and gate electrode of the select transistor 102 are electrically connected with a source line 103, with a bit line 104 via the magnetoresistive element 101, and with a word line 105, respectively. The basic structure of the magnetoresistive element 101 is a three-layer structure in which a non-magnetic layer 108 is sandwiched by two ferromagnetic layers, namely a first ferromagnetic layer 106 and a second ferromagnetic layer 107. In the illustrated example, the first ferromagnetic layer 106 has a fixed magnetization direction and serves as a reference layer. The second ferromagnetic layer 107 has a variable magnetization direction and serves as a recording layer. This magnetoresistive element 101 has a low resistance when the magnetization direction of the first ferromagnetic layer 106 and the magnetization direction of the second ferromagnetic layer 107 are mutually parallel (P state), and a high resistance when they are anti-parallel (AP state). With MRAM, this change in resistance is made to correspond to bit information of “0” and “1”. Bit information is written through spin-transfer torque magnetization switching caused by the current flowing through the magnetoresistive element 101. When a current flows from the reference layer to the recording layer, the magnetization of the recording layer becomes anti-parallel to the magnetization of the reference layer, and the bit information becomes “1”. When a current flows from the recording layer to the reference layer, the magnetization of the recording layer becomes parallel to the magnetization of the reference layer, and the bit information becomes “0”. Since the speed of magnetization switching by current is approximately 1 nanosecond, MRAM can be written to at an extremely high speed. In addition, since bit information is recorded by way of the magnetization direction of the recording layer, MRAM is non-volatile, and is able to keep standby power consumption low. Accordingly, there are high expectations for MRAM as a next-generation memory.

In addition, although the case illustrated in FIG. 1 is one where the first ferromagnetic layer 106 of the magnetoresistive element 101 is a reference layer, and the second ferromagnetic layer 107 a recording layer, it would still similarly operate as MRAM even if the first ferromagnetic layer 106 of the magnetoresistive element 101 were made to be a recording layer with a variable magnetization direction, and the second ferromagnetic layer 107 a reference layer with a fixed magnetization direction. In this case, too, when a current flows from the reference layer to the recording layer, the magnetization of the recording layer becomes anti-parallel to the magnetization of the reference layer, and the bit information becomes “1”. When a current flows from the recording layer to the reference layer, the magnetization of the recording layer becomes parallel to the magnetization of the reference layer, and the bit information becomes “0”.

CITATION LIST Non-Patent Literature

Non-Patent Literature 1: S. MANGIN, D. RAVELOSONA, J. A. KATINE, M. J. CAREY, B. D. TERRIS and ERIC E. FULLERTON, “Current-induced magnetization reversal in nanopillars with perpendicular anisotropy”, Nature Mater. 5, 210 (2006).

SUMMARY OF INVENTION Technical Problem

There are obstacles to realizing MRAM, chief examples thereof being the conditions that three characteristics of the magnetoresistive element as a recording element must satisfy, namely, magnetoresistance ratio (MR ratio), switching current density, and thermal stability factor. These conditions vary depending on the density, feature size, operation speed, etc., of the MRAM. By way of example, the higher the read speed is, the higher the required magnetoresistance ratio value becomes. Although it varies depending on whether the MRAM is an embedded memory or a stand-alone memory, a high magnetoresistance ratio of 50% to upwards of 100% is generally required. In addition, to increase write speed and reduce power consumption, a switching current density of 2×10⁶ A/cm² or less is required. Further, for a retention time of 10 years or longer and to prevent write errors, a thermal stability factor of 80 or greater is required.

There is known a configuration where a material containing a 3d transition metal element is used for the first ferromagnetic layer 106 and the second ferromagnetic layer 107, and MgO for a first non-magnetic layer, to achieve a high magnetoresistance ratio. In this case, it is preferable that the material containing a 3d transition metal element crystallize into a bcc structure through annealing. This is because when the material containing a 3d transition metal element is of a bcc structure, it has an advantage in that it achieves coherent conduction with MgO, as a result of which the magnetoresistance ratio tends to be high. In this case, the magnetization directions of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 become parallel to the film surface as in FIG. 1. On the other hand, when a multi layer film of Co and Pt, Ni and Pt, etc., or a perpendicular magnetic anisotropy material, chief examples of which are such alloys as FePt, TbTeCo, etc., is used for the first ferromagnetic layer 106 and the second ferromagnetic layer 107 as in Non-Patent Literature 1, it is said that a low switching current density and a high thermal stability factor can be achieved. This is due to the fact that the magnetization directions of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 become perpendicular to the film surface. However, in the case of a combination of such perpendicular magnetic anisotropy materials and MgO, the magnetoresistance ratio becomes small. For this reason, the current situation is such that methods in which a material containing a 3d transition metal element of a bcc structure and whose magnetization is parallel to the film surface is inserted between MgO and a perpendicular magnetic anisotropy material, thereby increasing the MR ratio, and so forth, are being tried. However, with such methods, the structure becomes complex, and problems remain such as controlling the magnetization direction of the material containing a 3d transition metal element, the fact that the magnetoresistance ratio does not become as high as anticipated, etc.

Solution to Problem

In order to solve the problems discussed above, the material used for at least one of the first ferromagnetic layer 106 and second ferromagnetic layer 107 forming the magnetoresistive element in FIG. 1 is made to comprise a ferromagnetic layer with a small damping constant, such as a material containing at least one type of 3d transition metal, e.g., Co, Fe, etc., or a Heusler alloy, chief examples of which include Co₂MnSi, etc., thereby controlling the magnetoresistance ratio. Ordinarily, when a magnetoresistive element is fabricated with a material containing at least one type of 3d transition metal, e.g., Co, Fe, etc., and which becomes a bcc structure, the magnetization directions of the ferromagnetic layers become parallel to the film surface. However, the present inventors have developed a technique that achieves a low switching current density and a high thermal stability factor by controlling the thicknesses of the ferromagnetic layers to be 3 nm or less and making their magnetization directions perpendicular to the film surface.

With regard to an example in which CoFeB is used for the ferromagnetic layers, FIG. 2 shows, with respect to the temperature of the annealing step included in the fabrication process, the thickness that was required for the magnetization direction to become perpendicular to the film surface. In this example, annealing was performed over a period of one hour. The white circles and black circles in the chart represent the upper and lower limits of thickness, respectively. As can be seen in the chart, the thickness range of CoFeB for which the magnetization direction becomes perpendicular to the film surface varies with respect to annealing temperature. In addition, when this material is used, the magnetization direction becomes perpendicular to the film surface even in the absence of any annealing as can be seen in FIG. 2. When no annealing is performed, CoFeB is amorphous. When amorphous, as will be discussed later, although there is a disadvantage in that the resistance ratio becomes small, there is an advantage in that the magnitude of the magnetization is small.

The example in FIG. 2 is for CoFeB. For a material containing at least one type of 3d transition metal other than the above, the relationship between annealing temperature and the thickness required for the magnetization direction to become perpendicular to the film surface may in some cases differ from that in FIG. 2. However, by controlling the thickness so as to be appropriate for the material, it is possible to change the magnetization direction from being parallel to the film surface to being perpendicular. It is speculated that what causes the magnetization direction to thus become perpendicular to the film surface is an atypical anisotropy change at the interface of CoFeB. By making the CoFeB film thinner by controlling it to an atomic layer level, the proportion of the volume within reach of the interface effect may be increased relative to the volume of the CoFeB layer. Consequently, the effect of the atypical anisotropy of the interface is manifested prominently, and the magnetization direction becomes perpendicular to the film surface. It is speculated that this effect is particularly prominent at interfaces between a compound containing oxygen, chief examples thereof being MgO, Al₂O₃, SiO₂, etc., and a ferromagnetic material comprising at least one type of 3d transition metal, e.g., Co, Fe, etc., and that there is a tendency for magnetization to become perpendicular to the film surface more readily.

On the other hand, FIG. 3 shows, with respect to annealing temperature, the magnetoresistance ratio of a magnetoresistive element in a case where, by way of example, CoFeB is used for the first ferromagnetic layer 106 and the second ferromagnetic layer 107. As the annealing temperature rises, the magnetoresistance ratio increases. Accordingly, in this example, in order to obtain a magnetoresistance ratio of 70% for example, annealing may be performed at approximately 250° C., or in order to obtain a magnetoresistance ratio of 100%, annealing may be performed at 300° C. In so doing, assuming the annealing temperature is 300° C., FIG. 2 indicates that, in order to obtain a magnetoresistive element having a magnetization direction that is perpendicular to the film surface, the thicknesses of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 may be controlled to be approximately 1.0 nm to 1.6 nm.

Even in cases where other materials are used, by examining the relationship between annealing temperature and magnetoresistance ratio in advance, it is possible to fabricate a magnetoresistive element with which the desired magnetoresistance ratio is achieved and in which the magnetization direction is perpendicular to the film surface. FIG. 4 shows the change in resistance of a magnetoresistive element with respect to a magnetic field applied perpendicularly to the film surface with regard to a case where CoFeB is used as the material of the first ferromagnetic layer 106 and the second ferromagnetic layer 107, and MgO for the non-magnetic layer 108. In this example, the annealing temperature was 300° C. From the experiment results, it can be seen that the magnetization direction is perpendicular to the film surface. In addition, the magnetoresistance ratio in this case was 100%.

Advantageous Effects of Invention

By employing the present invention, a magnetoresistive element with a large magnetoresistance ratio and whose magnetization direction is perpendicular to the film surface may be fabricated with ease. In addition, if one wishes to control the magnetoresistance ratio, by controlling the annealing temperature while adjusting the thicknesses of a first ferromagnetic layer and a second ferromagnetic layer so formed as to sandwich a non-magnetic layer, a magnetoresistive element that maintains a magnetization direction perpendicular to the film surface may be fabricated.

BRIEF DESCRIPTION OF DRAWINGS

FIG. 1 is a schematic view showing a basic structure of a memory cell of magnetic memory.

FIG. 2 is a diagram showing, with respect to annealing temperature, changes in the thickness required for the magnetization direction of a magnetoresistive element to become perpendicular to the film surface for a case where CoFeB is used for a first ferromagnetic layer and a second ferromagnetic layer.

FIG. 3 is a diagram showing changes in the magnetoresistance ratio of a magnetoresistive element with respect to annealing temperature for a case where CoFeB is used for a first ferromagnetic layer and a second ferromagnetic layer.

FIG. 4 is a diagram showing changes in the resistance of a magnetoresistive element with respect to a magnetic field applied perpendicularly to the film surface for a case where CoFeB is used for a first ferromagnetic layer and a second ferromagnetic layer.

FIG. 5 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 6 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 7 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 8 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 9 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 10 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 11 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 12 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 13 is a schematic sectional view showing an example of a magnetoresistive element according to the present invention.

FIG. 14 is a conceptual diagram showing an example of magnetic memory according to the present invention.

DESCRIPTION OF EMBODIMENTS

Magnetic memory and magnetoresistive elements to which the present invention is applied are described in detail below with reference to the drawings.

EXAMPLE 1

According to an aspect of the present invention, the magnetoresistive element 101 comprises, as shown in FIG. 5, the first ferromagnetic layer 106 with a fixed magnetization direction, the second ferromagnetic layer 107 with a variable magnetization direction, and the non-magnetic layer 108 electrically connected between the first ferromagnetic layer and the second ferromagnetic layer. For the material of the first ferromagnetic layer 106 and the second ferromagnetic layer 107, a ferromagnetic material containing at least one type of 3d transition metal element, e.g., Co, Fe, etc., or a Heusler alloy, chief examples of which include Co₂MnSi, etc., is preferable. For the material of the non-magnetic layer 108, compounds containing oxygen, e.g., MgO, Al₂O₃, SiO₂, etc., and metals, e.g., Cu, etc., are candidates, where a material that results in a large magnetoresistance ratio is preferable. For Example 1, a description is provided taking as an example a case where the material of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 is CoFeB, and the non-magnetic layer 108 comprises MgO.

As shown in FIG. 2, by controlling the thicknesses of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 to be approximately 1.0 nm to 1.6 nm, magnetization 501 of the first ferromagnetic layer 106 and magnetization 502 of the second ferromagnetic layer 107 become perpendicular to the film surface when the annealing temperature is 300° C. As shown in FIG. 3, in this case, a magnetoresistance ratio of 100% or above is achieved. In the example in FIG. 5, by providing a difference in thickness between the first ferromagnetic layer 106 and the second ferromagnetic layer 107 within a range where the magnetization directions are perpendicular to the film surface, a difference in coercivity was created, the first ferromagnetic layer 106 was made to be a reference layer, and the second ferromagnetic layer 107 was made to be a recording layer. As an example, the first ferromagnetic layer 106 was made to be 1.0 nm in thickness, and the second ferromagnetic layer 107 was made to be 1.2 nm in thickness. In the case of this example, the thinner ferromagnetic layer 106 functioned as a reference layer. Naturally, the thicknesses may also be so adjusted as to have the first ferromagnetic layer 106 be a recording layer, and the second ferromagnetic layer 107 a reference layer.

In addition, although the magnetization direction of the first ferromagnetic layer 106, which is the reference layer, is upward in the example in FIG. 5, it may also be fixed downward. In addition, at least one of the first ferromagnetic layer 106 and the second ferromagnetic layer 107 may be formed with a ferromagnetic body whose magnetization direction changes from being parallel to the film surface to being perpendicular by controlling the annealing temperature and the thickness, and the other with a multi-layer film, e.g., Co and Pt, Ni and Pt, etc., or with some other conventionally known perpendicular magnetic anisotropy material, e.g., FePt and TbTeCo alloys, etc.

FIG. 6 shows an example of a case where FePt, which is a conventionally known perpendicular anisotropy material, was used for the first ferromagnetic layer 106 to make it a reference layer, and CoFeB was used for the second ferromagnetic layer 107. In this case, since the materials differ between the recording layer and the reference layer, a coercivity difference may be created with ease. With respect to the annealing temperature in this case, the resistance ratio of a magnetoresistive element in which CoFeB is used may be taken into consideration. By way of example, to obtain a resistance ratio of 100%, it may be made to be 300° C. Further, in the case of CoFeB, if annealing is to be performed at 300° C., the magnetization direction may be made perpendicular to the film surface by having the thickness be 1.0 nm to 1.6 nm. In addition, a further layer made of a ferromagnetic body containing at least one type of 3d transition metal, e.g., Co, Fe, etc., or a Heusler alloy may also be inserted between the first ferromagnetic layer 106 and the non-magnetic layer 108.

The magnetoresistive element 101 may also be of a structure comprising an underlayer 503 and a capping layer 504. Since the underlayer 503 is a layer that serves as a foundation for fabricating the magnetoresistive element 101, its surface roughness must be of a small value. By way of example, Ta and Ru may be used. It may also be of a multi-layer structure, e.g., Ta/Ru/Ta, etc. In addition, the underlayer may also be made to function as an orientation control layer. In particular, when a conventionally known perpendicular anisotropy material, e.g., FePt, etc., discussed above, is used for the first ferromagnetic layer 106, there is a strong need for orientation control. The capping layer 504 also serves the purpose of protecting the magnetoresistive element, and, by way of example, MgO, Ru, Ta, etc., may be used. The capping layer 504, too, may be of a multi-layer structure, e.g., Ta/Ru, etc.

EXAMPLE 2

According to another aspect of the present invention, a magnetoresistive element may also be of a structure where a second non-magnetic layer 701 is formed at an interface 702 of the second ferromagnetic layer 107, which acts as a recording layer, on the opposite side to the non-magnetic layer 108. A schematic sectional view of a magnetoresistive element of Example 2 is shown in FIG. 7.

With the magnetoresistive element of Example 1, the interface effect for causing the magnetization of the second ferromagnetic layer 107 to be perpendicular to the film surface occurred only at an interface 703 between the second ferromagnetic layer 107 and the non-magnetic layer 108. With the magnetoresistive element 101 of Example 2, however, the interface effect also occurs at the interface 702 between the second ferromagnetic layer 107 and the second non-magnetic layer 701. Thus, as compared to the magnetoresistive element of Example 1, with the magnetoresistive element of Example 2, the magnetization direction of the second ferromagnetic layer 107 becomes more firmly perpendicular to the film surface, thereby enabling an increase in thermal stability factor. In so doing, the thickness of the second ferromagnetic layer 107 is so controlled that the magnetization would be perpendicular to the film surface and as to maximize the interface effect, and it may in some cases differ from the thickness of the second ferromagnetic layer 107 with respect to the configuration of Example 1. In the example in FIG. 7, CoFeB was used for the first ferromagnetic layer 106 and the second ferromagnetic layer 107, and MgO was used for the non-magnetic layer 108 and the non-magnetic layer 701. An annealing temperature of 300° C. in this case resulted in a resistance ratio exceeding 100%. In addition, in this example, by making the thickness of the second ferromagnetic layer 107 be 1.2 nm, the magnetization direction became perpendicular to the film surface. Candidates for the material of the second non-magnetic layer 701 include compounds containing oxygen, e.g., MgO, Al₂O₃, SiO₂, etc., and metals such as Cu, etc. It is preferable that a material that results in a greater interface effect for causing the magnetization direction of the second ferromagnetic layer 107 to be perpendicular be selected.

EXAMPLE 3

According to a further aspect of the present invention, a recording layer of a magnetoresistive element may be of a structure where, from the surface in contact with the non-magnetic layer 108, ferromagnetic layers and non-magnetic layers are alternately laminated. FIG. 8 shows, by way of example, a schematic sectional view for a case where, as the recording layer, four layers are laminated, as in ferromagnetic layer/non-magnetic layer/ferromagnetic layer/non-magnetic layer. Here, for a magnetoresistive element of Example 3, the recording layer may be of a laminate structure comprising three or more layers.

By adopting such a structure, because the number of interfaces between a ferromagnetic layer and a non-magnetic layer increases, there occurs a greater interface effect for causing the magnetization direction of a recording layer 801 to be perpendicular, thereby enabling an increase in thermal stability factor as compared to the magnetoresistive element of Example 2. In addition, the fact that the total volume of the ferromagnetic layer parts forming the recording layer 801 increases also contributes to the increase in thermal stability factor. For the material of the ferromagnetic layers forming the recording layer 801, a ferromagnetic material containing at least one type of 3d transition metal element, e.g., Co, Fe, etc., or a Heusler alloy is preferable. For the material of the non-magnetic layers forming the recording layer 801, candidates include compounds containing oxygen, e.g., MgO, Al₂O₃, SiO₂, etc., and metals, e.g., Cu, etc. It is preferable that materials that result in a greater interface effect for causing the magnetization direction of the recording layer 801 to be perpendicular be selected. In addition, control is necessary so that the magnetization of the ferromagnetic layers forming the recording layer 801 would be perpendicular to the film surface and so as to maximize the interface effect. There may be cases where the thickness would be different from that of the second ferromagnetic layer 107 with respect to the configuration of Example 1 or Example 2.

In the example shown in FIG. 8, the material of ferromagnetic layers 802 and 804 forming the recording layer 801 was CoFeB, and the material of non-magnetic layers 803 and 805 forming the recording layer 801 was MgO. In this example, an annealing temperature of 300° C. resulted in a resistance ratio of 100%. In addition, by having the ferromagnetic layers 802 and 804 forming the recording layer 801 in this case each be 1.2 nm in thickness, the magnetization direction became perpendicular to the film surface. Further, the magnetizations of the ferromagnetic layer 802 and the ferromagnetic layer 804 forming the recording layer 801 may be arranged to be mutually parallel or anti-parallel, and this arrangement is controlled by varying the thickness of the non-magnetic layer 803 between the two. In addition, the material of the non-magnetic layer 803 forming the recording layer 801 may also be a non-magnetic body containing at least one type of element from among such elements as Ru, Rh, V, etc. In this case, because exchange coupling occurs between the ferromagnetic layer 802 and the ferromagnetic layer 804, by controlling the thickness of the non-magnetic layer 803, the magnetization directions of the ferromagnetic layer 802 and the ferromagnetic layer 804 may be changed to be parallel or anti-parallel with ease.

EXAMPLE 4

According to another aspect of the present invention, a magnetoresistive element may also be of a structure where a second non-magnetic layer 901 is formed at an interface 903 of the first ferromagnetic layer 106, which acts as a reference layer, on the opposite side to the non-magnetic layer 108. A schematic sectional view of a magnetoresistive element of Example 4 is shown in FIG. 9.

With the magnetoresistive element of Example 1, the interface effect for causing the magnetization of the first ferromagnetic layer 106 to be perpendicular to the film surface occurred only at an interface 902 between the first ferromagnetic layer 106 and the non-magnetic layer 108. With the magnetoresistive element of Example 4, however, the interface effect also occurs at the interface 903 between the first ferromagnetic layer 106 and the second non-magnetic layer 901. Thus, as compared to the magnetoresistive element of Example 1, with the magnetoresistive element of Example 4, the magnetization direction of the first ferromagnetic layer 106 becomes more firmly perpendicular to the surface, thereby enabling an increase in thermal stability factor. In so doing, the thickness of the first ferromagnetic layer 106 is so controlled that the magnetization would be perpendicular to the film surface and as to maximize the interface effect, and it may in some cases differ from the thickness of the first ferromagnetic layer 106 with respect to the configuration of Example 1.

As an example of the structure in FIG. 9, CoFeB was used for the first ferromagnetic layer 106 and the second ferromagnetic layer 107, and MgO was used for the non-magnetic layer 108 and the non-magnetic layer 901. An annealing temperature of 300° C. resulted in a resistance ratio exceeding 100%. In addition, in this example, by having the first ferromagnetic layer 106 be 1.0 nm in thickness, the magnetization direction became perpendicular to the film surface. Candidates for the material of the second non-magnetic layer 901 include compounds containing oxygen, e.g., MgO, Al₂O₃, SiO₂, etc., and metals such as Cu, etc. It is preferable that a material that results in a greater interface effect for causing the magnetization direction of the first ferromagnetic layer 106 to be perpendicular be selected.

EXAMPLE 5

According to another aspect of the present invention, a reference layer 1001 of a magnetoresistive element may be of a structure where, from the surface in contact with the non-magnetic layer 108, ferromagnetic layers and non-magnetic layers are alternately laminated. FIG. 10 shows, by way of example, a sectional view for a case where, as the reference layer 1001, four layers are laminated, as in ferromagnetic layer/non-magnetic layer/ferromagnetic layer/non-magnetic layer. Here, for a magnetoresistive element of Example 5, the reference layer may be of a laminate structure comprising three or more layers.

By adopting such a structure, because the number of interfaces between a ferromagnetic layer and a non-magnetic layer increases, there occurs a greater interface effect for causing the magnetization direction of the reference layer 1001 to be perpendicular, and the total volume of the ferromagnetic layer parts forming the reference layer 1001 increases, as a result of which the magnetization direction stabilizes in the perpendicular direction to the film surface. For the material of ferromagnetic layers 1002 and 1004 forming the reference layer 1001, a ferromagnetic material containing at least one type of 3d transition metal element, e.g., Co, Fe, etc., or a Heusler alloy is preferable. For the material of non-magnetic layers 1003 and 1005 forming the reference layer 1001, candidates include compounds containing oxygen, e.g., MgO, Al₂O₃, SiO₂, etc., and metals, e.g., Cu, etc. It is preferable that materials that result in a greater interface effect for causing the magnetization direction of the reference layer 1001 to be perpendicular be selected. In addition, control is necessary so that the magnetization of the ferromagnetic layers forming the reference layer 1001 would be perpendicular to the film surface and so as to maximize the interface effect. There may be cases where the thickness would be different from that of the first ferromagnetic layer 106 with respect to the configuration of Example 1 or Example 4.

In the example of the configuration shown in FIG. 10, the material of the ferromagnetic layers 1002 and 1004 forming the reference layer 1001 was CoFeB, and the material of the non-magnetic layers 1003 and 1005 forming the reference layer 1001 was MgO. In this example, an annealing temperature of 300° C. resulted in a resistance ratio of 100%. In addition, by having the ferromagnetic layers 1002 and 1004 forming the reference layer 1001 in this case each be 1.0 nm in thickness, the magnetization direction became perpendicular to the film surface. Further, the magnetizations of the ferromagnetic layer 1002 and the ferromagnetic layer 1004 forming the reference layer 1001 may be arranged to be mutually parallel or anti-parallel, and this arrangement is controlled by varying the thickness of the non-magnetic layer 1003 between the two. In addition, the material of the non-magnetic layer 1003 forming the reference layer 1001 may also be a non-magnetic body containing at least one type of element from among such elements as Ru, Rh, V, etc. In this case, because exchange coupling occurs between the magnetizations of the ferromagnetic layer 1002 and the ferromagnetic layer 1004, by controlling the thickness of the non-magnetic layer 1003, the magnetization directions of the ferromagnetic layer 1002 and the ferromagnetic layer 1004 may be changed to be parallel or anti-parallel with ease.

EXAMPLE 6

According to another aspect of the present invention, a magnetoresistive element may also be of a structure comprising a non-magnetic layer 1103 and a non-magnetic layer 1104, the non-magnetic layer 1103 being formed for a reference layer 1101 at an interface of the first ferromagnetic layer 106 on the opposite side to the non-magnetic layer 108, and the non-magnetic layer 1104 being formed for a recording layer 1102 at an interface of the second ferromagnetic layer 107 on the opposite side to the non-magnetic layer 108. A schematic sectional view of a magnetoresistive element of Example 6 is shown in FIG. 11. By adopting such a configuration, both the reference layer and the recording layer stabilize in the perpendicular direction to the film surface.

EXAMPLE 7

According to another aspect of the present invention, a magnetoresistive element may also be of a configuration comprising: as a reference layer 1201, a structure where, from the surface in contact with the non-magnetic layer 108, ferromagnetic layers and non-magnetic layers are alternately laminated; and, as a recording layer 1202, a structure where, from the surface in contact with the non-magnetic layer 108, ferromagnetic layers and non-magnetic layers are alternately laminated. FIG. 12 shows, by way of example, a schematic sectional view for a case where, as the reference layer 1201, four layers are laminated, as in ferromagnetic layer 1203/non-magnetic layer 1204/ferromagnetic layer 1205/non-magnetic layer 1206 in order from the side of the non-magnetic layer 108, and where, as the recording layer 1202, four layers are laminated, as in ferromagnetic layer 1210/non-magnetic layer 1209/ferromagnetic layer 1208/non-magnetic layer 1207 in order from the side of the non-magnetic layer 108. By adopting such a configuration, both the reference layer and the recording layer stabilize in the perpendicular direction to the film surface.

EXAMPLE 8

According to another aspect of the present invention, with respect a magnetoresistive element, the configuration may also be one in which an antiferromagnetic layer 1301 is formed at an interface of the reference layer 106 on the opposite side to the non-magnetic layer 108 as shown in the schematic sectional view in FIG. 13. By adopting such a configuration, the magnetization direction of the reference layer 106 stabilizes in the perpendicular direction to the film surface.

EXAMPLE 9

According to another aspect of the present invention, it is possible to realize a MRAM by employing the magnetoresistive elements of Examples 1-8 as recording elements. A MRAM of the present invention comprises, as shown in FIG. 14: a plurality of bit lines 104 disposed parallel to one another; a plurality of source lines 103 disposed parallel to the bit lines 104 as well as to one another; and a plurality of word lines 105 disposed perpendicularly to the bit lines 104 and parallel to one another. A memory cell 100 is disposed at each point of intersection between the bit lines 104 and the word lines 105. The memory cells 100 each comprise the magnetoresistive element 101 of Examples 1-8 and a select transistor 102. The plurality of memory cells 100 form a memory array 1401. The bit line 104 is electrically connected with the drain electrode of the select transistor 102 via the magnetoresistive element 101. The source line 103 is electrically connected with the source electrode of the select transistor 102 via a wire layer. In addition, the word line 105 is electrically connected with the gate electrode of the select transistor 102. One end of the source line 103 and the bit line 104 is electrically connected with a write driver 1402 and a sense amplifier 1403 for applying a voltage. One end of the word line 105 is electrically connected with a word driver 1404.

In a “0” write operation, a current is passed through the source line 103 from the bit line 104 via the magnetoresistive element 101 by applying a voltage across the bit line 104 from the write driver 1402, while also applying a voltage across the word line 105 from the word driver 1404. In this case, if, as in FIG. 6, the configuration of the magnetoresistive element 101 is such that the first ferromagnetic layer 106 is the reference layer and the second ferromagnetic layer 107 is the recording layer, the magnetoresistive element 101 becomes low in resistance, and the information held by the magnetoresistive element 101 becomes “0”. On the other hand, in a “1” write operation, a current is passed through the bit line 104 from the source line 103 via the magnetoresistive element 101 by applying a voltage across the source line 103 from the write driver 1402, while also applying a voltage across the word line 105 from the word driver 1404. In this case, the magnetoresistive element 101 becomes high in resistance, and the information held by the magnetoresistive element 101 becomes “1”. When reading, differences in the signal caused by changes in resistance are read using the sense amplifier 1403. By adopting a memory array of such a configuration, the magnetoresistance ratio increases, the switching current density decreases, and the thermal stability factor increases. Thus, the MRAM is able to operate as a non-volatile memory.

REFERENCE SIGNS LIST

-   100 Memory cell of magnetic memory -   101 Magnetoresistive element -   102 Select transistor -   103 Source line -   104 Bit line -   105 Word line -   106 First ferromagnetic layer -   107 Second ferromagnetic layer -   108 Non-magnetic layer -   501 Magnetization -   502 Magnetization -   503 Underlayer -   504 Capping layer -   701 Second non-magnetic layer -   801 Recording layer -   802 Ferromagnetic layer -   803 Non-magnetic layer -   804 Ferromagnetic layer -   805 Non-magnetic layer -   901 Non-magnetic layer -   1001 Reference layer -   1002 Ferromagnetic layer -   1003 Non-magnetic layer -   1004 Ferromagnetic layer -   1005 Non-magnetic layer -   1101 Reference layer -   1102 Recording layer -   1103 Non-magnetic layer -   1104 Non-magnetic layer -   1201 Reference layer -   1202 Recording layer -   1203 Ferromagnetic layer -   1204 Non-magnetic layer -   1205 Ferromagnetic layer -   1206 Non-magnetic layer -   1207 Non-magnetic layer -   1208 Ferromagnetic layer -   1209 Non-magnetic layer -   1210 Ferromagnetic layer -   1301 Antiferromagnetic layer -   1401 Memory array -   1402 Write driver -   1403 Sense amplifier -   1404 Word driver 

1. A magnetoresistive element, comprising: a first ferromagnetic layer with a fixed magnetization direction; a second ferromagnetic layer with a variable magnetization direction; and a first non-magnetic layer that is electrically connected between the first ferromagnetic layer and the second ferromagnetic layer, wherein the first ferromagnetic layer acts as a reference layer and the second ferromagnetic layer acts as a recording layer, at least one of the first ferromagnetic layer and the second ferromagnetic layer comprises a ferromagnetic body whose magnetization direction has changed from being parallel to a film surface to being perpendicular as a result of controlling thickness, and the magnetization direction is perpendicular to the film surface as a result of having a magnetoresistance ratio controlled and of controlling thickness.
 2. The magnetoresistive element according to claim 1, wherein, with respect to at least one of the first ferromagnetic layer and the second ferromagnetic layer, the magnetization direction is controlled to be perpendicular to the film surface by adjusting an annealing temperature and adjusting the thickness to 3 nm or below.
 3. The magnetoresistive element according to claim 1, wherein the first ferromagnetic layer and the second ferromagnetic layer are 1.0 nm to 1.6 nm in thickness.
 4. The magnetoresistive element according to claim 1, wherein the first ferromagnetic layer and the second ferromagnetic layer are not annealed and are amorphous, and their magnetization directions are controlled to be perpendicular to the film surface by adjusting their thicknesses.
 5. The magnetoresistive element according to claim 1, wherein the first non-magnetic layer comprises an insulator containing oxygen.
 6. The magnetoresistive element according to claim 1, wherein the ferromagnetic layer forming at least one of the reference layer and the recording layer comprises a ferromagnetic material containing at least one type of 3d transition metal.
 7. The magnetoresistive element according to claim 1, wherein at least one of the reference layer and the recording layer comprises a ferromagnetic material containing at least one of Co and Fe, with respect to the reference layer and the recording layer, their magnetization directions are controlled to be perpendicular to the film surface by adjusting their thicknesses to 3 nm or below, the first non-magnetic layer comprises magnesium oxide, and the magnetoresistance ratio is controlled to be at least 50% or greater.
 8. The magnetoresistive element according to claim 1, wherein the ferromagnetic layer forming at least one of the reference layer and the recoding layer comprises a ferromagnetic body with a small damping constant.
 9. The magnetoresistive element according to claim 8, wherein the ferromagnetic body with the small damping constant comprises a Heusler alloy.
 10. The magnetoresistive element according to claim 1, further comprising a second non-magnetic layer on a surface of the second ferromagnetic layer on an opposite side to the first non-magnetic layer, wherein the second non-magnetic layer acts as a control layer for controlling the magnetization direction of the second ferromagnetic layer.
 11. The magnetoresistive element according to claim 1, further comprising a third non-magnetic layer on a surface of the first ferromagnetic layer on an opposite side to the first non-magnetic layer, wherein the third non-magnetic layer acts as a control layer for controlling the magnetization direction of the first ferromagnetic layer.
 12. The magnetoresistive element according to claim 1, wherein an antiferromagnetic layer is formed on a surface of the reference layer on an opposite side to the first non-magnetic layer.
 13. The magnetoresistive element according to claim 1, wherein the recording layer comprises a laminate structure in which, in order from a surface in contact with the first non-magnetic layer, three or more layers comprising a ferromagnetic layer and a non-magnetic layer are alternately laminated, and with respect to magnetizations of the plurality of ferromagnetic layers forming the recording layer, their magnetization directions are coupled in a mutually parallel or anti-parallel manner.
 14. The magnetoresistive element according to claim 1, wherein the reference layer comprises a laminate structure in which, in order from a surface in contact with the first non-magnetic layer, three or more layers comprising a ferromagnetic layer and a non-magnetic layer are alternately laminated, and with respect to magnetizations of the plurality of ferromagnetic layers forming the reference layer, their magnetization directions are coupled in a mutually parallel or anti-parallel manner.
 15. The magnetoresistive element according to claim 13, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises an insulator containing oxygen.
 16. The magnetoresistive element according to claim 13, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises magnesium oxide.
 17. The magnetoresistive element according to claim 13, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises at least one of Ru, Rh, and V.
 18. A magnetic memory, comprising: a plurality of bit lines disposed parallel to one another; a plurality of source lines disposed parallel to one another in a direction parallel to the bit lines; a plurality of word lines disposed parallel to one another in a direction that intersects with the bit lines; and magnetoresistive elements disposed at parts where the bit lines and the word lines intersect, wherein the bit lines are electrically connected with one end of the magnetoresistive elements, the other end of the magnetoresistive elements is electrically connected with drain electrodes of select transistors, the source lines are electrically connected with source electrodes of the select transistors, the word lines are electrically connected with gate electrodes of the select transistors, the magnetic memory comprises a mechanism for applying a current in a film surface perpendicular direction of the magnetoresistive elements, and the magnetoresistive elements comprise the magnetoresistive element according to claim
 1. 19. The magnetoresistive element according to claim 14, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises an insulator containing oxygen.
 20. The magnetoresistive element according to claim 14, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises magnesium oxide.
 21. The magnetoresistive element according to claim 14, wherein the non-magnetic layer alternately laminated with the ferromagnetic layers comprises at least one of Ru, Rh, and V. 